Vacuum chamber

Balzers BAK 760

We offer used Balzers BAK 760 physical vacuum deposition system, year of construction/refurbishing 2003.
Year of major upgrade 2010.

It is completely functional system for vacuum deposition of various optical materials on glass or other substrates. Elements of system are:
- Vacuum chamber BAK 760 (760 mm maximum internal size)
- Completely automatic deposition process, based on Windows real time software.
- All process control system elements based on Profibus input/output modules.
- 2x E-gun, max 10kW power, with 2 shutters
- 2x Thermal evaporator, with 2 shutters
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- Knudsen planetarium system with 3 arms, increases deposition capacity >2x, increases homogeneity of deposition
- Upgrade - ion assisted deposition system (2010) for denser layers
- Two low vacuum pumps (Edwards 250 m3/h roots - main, Balzers 170 m3/h - backup)
- Cold and warm water circuits included
- Glass substrate cleaning machine based on Miele laboratory glass cleaning device included. Cleaning system is high productivity and low work force requirement process. Capacity of one batch (75 minutes process time) of 100 x 50 mm substrates = 320 pcs.
- Water purification system. 2 stage system. Stage 1. with simple regeneration process (salt). Stage 2. ion-exchange - external service regeneration. Good for >100 cleaning cycles.
- RGA 200 - residual gas analyzer, from Stanford research included (for analyzing vacuum gases and leakages)
- Number of stainless steel glass cleaning adjustable cassettes for substrates 25 x 25 mm to 120 x 100 mm and few for even larger substrates included.
- And a lot of various tools, spare parts and consumables.

All of above is preferably sold as fully functional system. Transfer to your site is demanding process and requires careful dismantling and setup on new location. Company setting up system on our production site can probably help with setup and testing on new site.

Visits to current site of equipment highly is recommended and test of equipment on your process welcomed.

If you have any questions or need more information, feel free to send us a message or give us a call.